ALD / CVD Precursor Series Products
High-purity ALD/CVD precursor product is one of the core source materials in the whole electronic industry system. It has been widely used in many aspects of electronic devices manufacturing, such as computer chips, solar cells, mobile communications, satellite navigation, spacecraft and so on. It plays an important role in aerospace, new solar cells, electronic products and other fields.
Hexachlorodisilane
Cl6Si2
≥99.999995%
Tetraethyl orthosilicate
C8H20O4Si
≥99.9999999%
Octamethyl cyclotetrasiloxane
C8H24O4Si4
≥99.999999%
Tetramethylsilane
C4H12Si
≥99.99999%
Trimethylborate
C6H15BO3
≥99.9999999%
Triethylphosphate
C6H15O4P
≥99.9999999%
Tetrakis(dimethylamido)titanium
C8H24N4Ti
≥99.9999%
Titaniumtetrachloride
Cl4Ti
≥99.99999%